Fig. 1. Microring characteristics map

Fig. 2. Relationship between coupling strength and phase mismatch

Fig. 3. Bend-coupled microring resonator

Fig. 4. XRD test chart of AlN single crystal film

Fig. 5. Flow chart of preparation of microring structure

Fig. 6. Pattern distortion caused by electron beam lithography of insulating substrate material

Fig. 7. The effect of electron beam lithography in the coupling area of two conductive layers

Fig. 8. SEM image of four groups of etching results with different parameters

Fig. 9. SEM image of bending coupling microring