Acta Photonica Sinica, Volume. 50, Issue 5, 86(2021)

Critical Coupling Condition and Preparation Technology of Aluminum Nitride Microring Resonator

Yishuai HAN1,2, Tianyu SUN2, Huimin JIA1, Jilong TANG1, Dan FANG1, Dengkui WANG1, Xiaohua WANG1, Baoshun ZHANG2, and Zhipeng WEI1
Author Affiliations
  • 1State Key Laboratory of High Power Semiconductor Laser, College of Science, Changchun University of Science and Technology, Changchun30022, China
  • 2Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou, Jiangsu1513, China
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    Aiming at the difficulty of achieving critical coupling conditions for aluminum nitride microring resonators, an aluminum nitride bending-coupled microring resonator is designed and prepared. Through the analysis of the coupling coefficient formula of the microring resonator, the advantages and disadvantages of various solutions to improve the coupling strength are respectively explained. Finally, a curved coupling zone structure is selected to enhance the coupling strength, and a solution to achieve critical coupling conditions under a wide coupling gap is obtained. A high-quality aluminum nitride single crystal film is grown on a sapphire substrate. Conductive glue is used to overcome the non-conductivity of the material. The electron beam exposure system is used to make the bending angle of 40°, the coupling gap of 0.190 μm, and the waveguide width of 0.41 μm. The microring resonant cavity is patterned, a number of aluminum nitride etching parameters are analyzed and optimized, and the pattern is finally transferred to the aluminum nitride layer to obtain a curved coupled aluminum nitride microring resonant cavity with uniform coupling gap and flat sidewalls. This research provides a reference for the selection of critical coupling conditions for aluminum nitride microring resonators.

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    Yishuai HAN, Tianyu SUN, Huimin JIA, Jilong TANG, Dan FANG, Dengkui WANG, Xiaohua WANG, Baoshun ZHANG, Zhipeng WEI. Critical Coupling Condition and Preparation Technology of Aluminum Nitride Microring Resonator[J]. Acta Photonica Sinica, 2021, 50(5): 86

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Nov. 23, 2020

    Accepted: Jan. 5, 2021

    Published Online: Jun. 22, 2021

    The Author Email:

    DOI:10.3788/gzxb20215005.0514003

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