Optics and Precision Engineering, Volume. 22, Issue 3, 656(2014)
High speed scanning for dynamic atomic force microscope based on higher-order resonance of silicon cantilever
Get Citation
Copy Citation Text
HUANG Qiang-xian, YOU Huan-jie, YUAN Dan, ZHAO Yang, HU Xiao-juan. High speed scanning for dynamic atomic force microscope based on higher-order resonance of silicon cantilever[J]. Optics and Precision Engineering, 2014, 22(3): 656
Category:
Received: Sep. 20, 2013
Accepted: --
Published Online: Apr. 24, 2014
The Author Email: Qiang-xian HUANG (huangqx@hfut.edu.cn)