Optics and Precision Engineering, Volume. 22, Issue 3, 656(2014)

High speed scanning for dynamic atomic force microscope based on higher-order resonance of silicon cantilever

HUANG Qiang-xian*... YOU Huan-jie, YUAN Dan, ZHAO Yang and HU Xiao-juan |Show fewer author(s)
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    HUANG Qiang-xian, YOU Huan-jie, YUAN Dan, ZHAO Yang, HU Xiao-juan. High speed scanning for dynamic atomic force microscope based on higher-order resonance of silicon cantilever[J]. Optics and Precision Engineering, 2014, 22(3): 656

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    Paper Information

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    Received: Sep. 20, 2013

    Accepted: --

    Published Online: Apr. 24, 2014

    The Author Email: Qiang-xian HUANG (huangqx@hfut.edu.cn)

    DOI:10.3788/ope.20142203.0656

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