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Acta Optica Sinica, Volume. 30, Issue 2, 602(2010)

Effects of Substrate Materials and Deposition Parameters on Film Stress

[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of Substrate Materials and Deposition Parameters on Film Stress[J]. Acta Optica Sinica, 2010, 30(2): 602

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    Paper Information

    Category: Thin Films

    Received: Apr. 15, 2009

    Accepted: --

    Published Online: Feb. 2, 2010

    The Author Email: (liyuqiongbit@yahoo.com.cn)

    DOI:10.3788/aos20103002.0602

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology