Infrared Technology, Volume. 45, Issue 8, 799(2023)

Research Progress of InAs/GaSb Type-II Superlattice Long-wave Infrared Detector

Yafang TIAN1、*, Yanli SHI2, and Fangjiang LI1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    In this study, the research progress of long-wave infrared detectors based on InAs/GaSb type-II superlattices (T2SLs) is systematically reported. The advantages and disadvantages of various device structures based on GaSb and InAs substrates are compared and analyzed from the perspective of substrate, material growth, and device performance. The results show that the structure of the device with InAs as the substrate, InAs/InAs1-xSbx as the absorber material, and PB1IB2N type is a relatively optimized design. Combining the multilayer structure design of ZnS and Ge, a heavy doping buffer layer, and the inductively coupled plasma (ICP) dry etching process, the 50% cutoff wavelength of the device can achieve 12 ?m, the quantum efficiency (QE) can be increased to more than 65%, and the dark current density can be reduced to 1×10-5 A/cm2. Finally, the future development trend of InAs/GaSb T2SLs long-wave infrared detectors is summarized.

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    TIAN Yafang, SHI Yanli, LI Fangjiang. Research Progress of InAs/GaSb Type-II Superlattice Long-wave Infrared Detector[J]. Infrared Technology, 2023, 45(8): 799

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    Paper Information

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    Received: May. 5, 2023

    Accepted: --

    Published Online: Dec. 15, 2023

    The Author Email: Yafang TIAN (xntyf@sohu.com)

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