Spectroscopy and Spectral Analysis, Volume. 29, Issue 5, 1260(2009)
Deposition and Structures Analysis of Amorphous SiNx Films Prepared by Magnetron Sputtering
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WU Yang, YI Li-xin, WANG Shen-wei, DU Yu-fan, HUANG Sheng, JI Guo-rui, WANG Yong-sheng. Deposition and Structures Analysis of Amorphous SiNx Films Prepared by Magnetron Sputtering[J]. Spectroscopy and Spectral Analysis, 2009, 29(5): 1260
Paper Information
Received: Mar. 26, 2008
Accepted: --
Published Online: May. 25, 2010
The Author Email: Yang WU (06122060@bjtu.edu.cn)
CSTR:32186.14.
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