Infrared and Laser Engineering, Volume. 44, Issue 3, 1048(2015)

Study on optical thin film parameters measurement method

Li Kaipeng*, Wang Duoshu, Li Chen, Wang Jizhou, Dong Maojin, and Zhang Ling
Author Affiliations
  • [in Chinese]
  • show less
    References(10)

    [1] [1] Ulrich R, Torge R.Measurement of thin film parameters with a prism coupler[J]. Applied Optics, 1973, 12(12):2901-2980.

    [2] [2] Bhattacharyya D, Sahoo N K, Thakur S, et al. Spectroscopic ellipsometry of TiO2 layers prepared by ion-assisted electron-beam evaporation[J]. Thin Solid Films(S0040-6090), 2000, 360(1/2): 96-102.

    [4] [4] Chen Yanping, Yu Feihong. Test methods for film thickness and optical constants[J]. Optical Instruments, 2006, 28(6): 84-88. (in Chinese)

    [6] [6] Dirk Perlman, Philippe Frederic Smet. Methods for the determination of the optical constants of thin films from single transmission measurements: a critical review [J]. Appl Phys, 2003, 3(6): 1850-1857.

    [7] [7] Yao Xilin, Tong Nanchun, Xiong Changxin. New methods for determining optical constants of thin films from single measurements[J]. Optical Design and Testing II, 2005, 5638(140): 1088 -1099. (in Chinese)

    [8] [8] Zhou Tianyu, Yang Kaiyong, Wu Suyong. Determination of optical constants and thicknesses of high-reflection multilayer system[J]. Journal of Applied Optics, 2011, 32(1): 128-132. (in Chinese)

    [9] [9] Wu Xianquan, Hua Wenshen, Xie Dabin, et al. Inversions of thickness and optical constants of thin film based on improved genetic algorithm[J]. Optical Instruments, 2010, 32(3): 86-90.(in Chinese)

    [10] [10] Jing Longkang, Jiang Yurong, Ni Ting. Application of adaptive simulated annealing genetic algorithm in inverse of optical constants and thickness of the thin film[J]. Optical Technique, 2012, 38(2): 218-222. (in Chinese)

    CLP Journals

    [1] WANG Guiquan, ZHANG Jinrong, SHAO Yi, ZHENG Wanxiang, TANG Yingjuan, HU Zhong, JIANG Xinping, LI Yansheng, LI Wei, WANG Qiaofang, ZI Zhenghua. Calculation of Optical Parameters of Diamond-like Carbon Film Based on Transmission Spectrum[J]. Infrared Technology, 2021, 43(5): 473

    [2] Zhiqi Zheng, Yongqiang Pan, Huan Liu, Weirong Yang, Ziyang He, Dong Li, Zelin Zhou. Inverting optical constants of YbF3 and YF3 thin films in the ultra-wide spectrum from 0.4 to 14 μm[J]. Infrared and Laser Engineering, 2021, 50(11): 20210371

    [3] ZHUANG Qiu-hui, LIU Guo-jun, FU Xiu-hua, MA Zi, WANG San-qiang. Depolarised Dichroic Mirror for the 355nm Ultraviolet Laser System[J]. Acta Photonica Sinica, 2016, 45(7): 70731001

    [4] Cheng Yong, Lu Yimin, Guo Yanlong, Huang Guojun, Wang Shuyun, Liu Xu, Cao Haiyuan, Chu Hua, Yang Xue. Setup, simulation and experiment of uniform DLC film deposited by PLD on large hemispherical substrate[J]. Infrared and Laser Engineering, 2016, 45(6): 621004

    [5] Chang Junlei, Li Fuqiang, Wang Weigang, Li Qinglin, Zhang Nan, Fan Junjie, Wu Yongjian, Zhang Mingzhu. Multi-band filter design and assessment for space optical-remote-sensing camera[J]. Infrared and Laser Engineering, 2018, 47(3): 320002

    [6] Runfu Wang, Duoshu Wang, Dong Fan, Chen Li, Jizhou Wang, Maojin Dong. Research on splicing integrated filter technology of short/medium infrared long line array[J]. Infrared and Laser Engineering, 2022, 51(6): 20210463

    Tools

    Get Citation

    Copy Citation Text

    Li Kaipeng, Wang Duoshu, Li Chen, Wang Jizhou, Dong Maojin, Zhang Ling. Study on optical thin film parameters measurement method[J]. Infrared and Laser Engineering, 2015, 44(3): 1048

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: 光电测量

    Received: Jul. 5, 2014

    Accepted: Aug. 3, 2014

    Published Online: Jan. 26, 2016

    The Author Email: Kaipeng Li (13259756785@163.com)

    DOI:

    Topics