Fig. 1. Schematic diagram of the micron structure model

Fig. 2. Transmittance spectra of microstructures with different morphologies on the silicon surface when T=1 μm，h=1.3 μm，f=0.5

Fig. 3. Comparison of the relationship between the height of different microstructures on the silicon surface and the transmittance

Fig. 4. Schematic of the geometric model of the nanostructure

Fig. 5. Transmission curve of nano-structures with different morphology on silicon surface

Fig. 6. Schematic of the geometric model of the micro-nano composite structure

Fig. 7. Transmittance curve of silicon surface micro-nano structure

Fig. 8. Intrinsic contact angle

Fig. 9. RPS etched microstructure outline

Fig. 10. Schematic of the wetting model of trapezoidal micrometer droplet

Fig. 11. Influence of silicon surface microstructure parameters on contact angle（f=0.5）

Fig. 12. Influence of duty cycle on the contact angle of silicon surface microstructure bottom（T=6 μm）

Fig. 13. Schematic of the formation of micro-nano composite structure

Fig. 14. The micro-nano composite structure with a period of 6 μm was obtained on the silicon surface

Fig. 15. Surface contact angles of monocrystalline silicon and it's three typical nanostructures

Fig. 16. PSD curves of different nanostructure morphologies on silicon surface

Fig. 17. Contact angle corresponding to different micro-nano composite structures on silicon surface

Fig. 18. Transmittance of micro-nano composite structure on silicon surface