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International Journal of Extreme Manufacturing, Volume. 5, Issue 3, 32003(2023)

Atomic layer deposition of thin films: from a chemistry perspective

[in Chinese]1... [in Chinese]2 and [in Chinese]1,* |Show fewer author(s)
Author Affiliations
  • 1School of Advanced Materials, Shenzhen Graduate School, Peking University, Shenzhen 518055, People’s Republic of China
  • 2Huawei Technologies Co., Ltd, Shenzhen 518129, People’s Republic of China
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    [in Chinese], [in Chinese], [in Chinese]. Atomic layer deposition of thin films: from a chemistry perspective[J]. International Journal of Extreme Manufacturing, 2023, 5(3): 32003

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    Paper Information

    Category: Topical Review

    Received: Nov. 16, 2022

    Accepted: --

    Published Online: Jul. 26, 2024

    The Author Email: (wangxw@pkusz.edu.cn)

    DOI:10.1088/2631-7990/acd88e

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology