Fig. 1. Structural diagram of chemiluminescence detector. (a) Principle diagram of NO and O3 mixing; (b) 3D schematic of gas mixing; (c) internal structure of chemiluminescence cavity

Fig. 2. Repeat measurement comparison of 5 kinds of detectors

Fig. 3. Measurement results of response time for 1.2 mm-length rectangular Si detector. (a) Trigger signal of given reference light source; (b) voltage signal received by detector

Fig. 4. Calibration curve of chemiluminescence NO sensor