Stitching Measurement of Line Density of Variable-Line-Spacing Gratings with Long Trace Profiler

Huaikun Wei; Shuhu Huan; Ying Liu; Huoyao Chen; Keqiang Qiu; Zhengkun Liu; Yilin Hong

doi:10.3788/AOS221409

Acta Optica Sinica, Volume. 43, Issue 3, 0312007(2023)

Stitching Measurement of Line Density of Variable-Line-Spacing Gratings with Long Trace Profiler

Huaikun Wei¹, Shuhu Huan¹, Ying Liu¹, Huoyao Chen², Keqiang Qiu¹, Zhengkun Liu^1、*, and Yilin Hong¹

Author Affiliations

¹National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, Anhui, China

²Anhui Zhongke Grating Technology Company Limited, Hefei 231605, Anhui, China

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Figures & Tables(9)

Fig. 1. Detection of grating line density when the beam is incident at the grating Littrow angle

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Fig. 2. Experimental grating diagram. (a) Physical diagram of variable pitch grating; (b) diagram of grating size and measurement position

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Fig. 3. Flow chart for calculating line density

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Fig. 4. Diagram of correspondence between the positions of adjacent segments

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Fig. 5. Difference between two measurements of line density in 13 segments. (a) Calculated by line density splicing method;(b) calculated by slope splicing method

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Fig. 6. Difference curves of line density measurements minus the corresponding line density fits in four sets of experiments

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Fig. 7. Difference curves between different experimental groups

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Table 1. Coefficients of fitting equation corresponding to each group of line density measurements

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Table 1. Coefficients of fitting equation corresponding to each group of line density measurements

Grouping	N₀/（lp·mm^-1）	N₁ /（lp·mm^-2）	N₂ /（lp·mm^-3）	N₃ /（lp·mm^-4）
7-segment line	1399.995	1.157408	4.164×10^-4	4.3×10^-7
9-segment line	1399.995	1.157366	4.162×10^-4	4.1×10^-7
13-segment line	1399.995	1.157464	4.164×10^-4	4.3×10^-7
25-segment line	1399.995	1.157422	4.169×10^-4	4.3×10^-7
Design value	1400	1.154300	4.203×10^-4

Table 2. Repeatability and smoothing of differences between 4 sets of line density measurements
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Table 2. Repeatability and smoothing of differences between 4 sets of line density measurements
Grouping $Δ N / N_{0}$ （RMS） a_PV，max /（lp·mm^-1）
25-segment line-7-segment line $1.13 \times 10^{- 6}$ 0.00658
25-segment line-9-segment line $1.12 \times 10^{- 6}$ 0.00542
25-segment line-13-segment line $1.02 \times 10^{- 6}$ 0.00382

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Huaikun Wei, Shuhu Huan, Ying Liu, Huoyao Chen, Keqiang Qiu, Zhengkun Liu, Yilin Hong. Stitching Measurement of Line Density of Variable-Line-Spacing Gratings with Long Trace Profiler[J]. Acta Optica Sinica, 2023, 43(3): 0312007

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Jul. 4, 2022

Accepted: Aug. 29, 2022

Published Online: Feb. 13, 2023

The Author Email: Liu Zhengkun (zhkliu@ustc.edu.cn)

DOI:10.3788/AOS221409

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Coefficients of fitting equation corresponding to each group of line density measurements

Table 1. Coefficients of fitting equation corresponding to each group of line density measurements

Table 2. Repeatability and smoothing of differences between 4 sets of line density measurements

Table 2. Repeatability and smoothing of differences between 4 sets of line density measurements