Optical design for EUV lithography source collector

Shuqing Zhang; Qi Wang; Dongyuan Zhu; Runshun Li; Chang Liu

doi:10.3788/COL201109.052201

Chinese Optics Letters, Volume. 9, Issue 5, 052201(2011)

Optical design for EUV lithography source collector

Shuqing Zhang¹, Qi Wang², Dongyuan Zhu¹, Runshun Li¹, and Chang Liu³

Author Affiliations

¹Research Center for Space Optical Engineering, Harbin Institute of Technology, Harbin 150080, China

²Institute of Opto-Electronics, Harbin Institute of Technology, Harbin 150080, China

³Center for Composite Material, Harbin Institute of Technology, Harbin 150080, China

show less

References(10)

[1] [1] Editorial office of EPE, EPE 20, 165 (2008).

[2] [2] A. Bayer, F. Barkusky, C. Peth, H. Tottger, and K. Mann, Proc. SPIE 6317, 631706 (2006).

[3] [3] F. E. Zocchi, Appl. Opt. 45, 8882 (2006).

[4] [4] H. Meiling, H. Meijer, V. Banine, R. Moors, R. Groeneveld, H.-J. Voorma, U. Mickan, B. Wolschrijn, B. Mertens, G. van Baars, P. K¨urz, and N. Harned, Proc. SPIE 6151, 615108 (2006).

[5] [5] H. Oizumi, Y. Tanaka, F. Kumasaka, I. Nishiyama, H. Kondo, M. Shiraishi, T. Oshino, K. Sugisaki, and K. Murakami, Proc. SPIE 5751, 102 (2005).

[6] [6] T. Miura, K. Murakami, K. Suzuki, Y. Kohama, Y. Ohkubo, and T. Asami, Proc. SPIE 6151, 615105 (2006).

[7] [7] F. E. Zocchi, E. Buratti, and V. Rigato, Proc. SPIE 6151, 61510T (2006).

[8] [8] B. L. Henke, E. M. Gullikson, and J. C. Davis, Atomic Data and Nuclear Data Tables 54, 181(1993).

[9] [9] Q.-M. Li, S.-Q. Zhang, and D.-Y. Zhu, in Proceesings of Laser Physics and Laser Technologies (RCSLPLT) and 2010 Academic Symposium on Optoelectronics Technology 209 (2010)

[10] [10] F. E. Zocchi and E. Benedetti, Proc. SPIE 6, 043002 (2007).

Cited By

[1] Wang Wen-Ting, Hu Bing, Wang Ming-Wei. Femtosecond laser fine machining of energetic materials. Acta Physica Sinica, 62, 060601(2013).

Tools

Get Citation

Copy Citation Text

Shuqing Zhang, Qi Wang, Dongyuan Zhu, Runshun Li, Chang Liu. Optical design for EUV lithography source collector[J]. Chinese Optics Letters, 2011, 9(5): 052201

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Optical Design and Fabrication

Received: Nov. 10, 2010

Accepted: Dec. 17, 2010

Published Online: Apr. 22, 2011

The Author Email:

DOI:10.3788/COL201109.052201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology