Chinese Optics Letters, Volume. 9, Issue 5, 052201(2011)

Optical design for EUV lithography source collector

Shuqing Zhang1, Qi Wang2, Dongyuan Zhu1, Runshun Li1, and Chang Liu3
Author Affiliations
  • 1Research Center for Space Optical Engineering, Harbin Institute of Technology, Harbin 150080, China
  • 2Institute of Opto-Electronics, Harbin Institute of Technology, Harbin 150080, China
  • 3Center for Composite Material, Harbin Institute of Technology, Harbin 150080, China
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    Wolter I collector is the best collector for extreme ultraviolet (EUV) lithography, which has a series of nested mirrors. It has high collection efficiency and can obtain more uniform intensity distribution at the intermediate focus (IF). A new design with the calculation sequence from the outer mirror to the inner one on the premise of satisfying the requirements of the collector is introduced. Based on this concept, a computer program is established and the optical parameters of the collector using the program is calculated. The design results indicate that the collector satisfies all the requirements.

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    Shuqing Zhang, Qi Wang, Dongyuan Zhu, Runshun Li, Chang Liu. Optical design for EUV lithography source collector[J]. Chinese Optics Letters, 2011, 9(5): 052201

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Nov. 10, 2010

    Accepted: Dec. 17, 2010

    Published Online: Apr. 22, 2011

    The Author Email:

    DOI:10.3788/COL201109.052201

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