Principle and Error Analysis of Dual-grating Interference Displacement Sensor

ZHANG Jin-hua; CHEN Liang-zhou; LIU Xiao-jun

Electro-Optic Technology Application, Volume. 27, Issue 3, 41(2012)

ZHANG Jin-hua... CHEN Liang-zhou and LIU Xiao-jun |Show fewer author(s)

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[6] [6] Su Shaojing, Liu Hui, Lu Haibao, et al. Doppler analysis for double-grating displacement measurement system with nanometer resolution[J]. Optics and Precision Engineering, 2003, 11(1): 17-21.

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ZHANG Jin-hua, CHEN Liang-zhou, LIU Xiao-jun. Principle and Error Analysis of Dual-grating Interference Displacement Sensor[J]. Electro-Optic Technology Application, 2012, 27(3): 41

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