Photonic Sensors, Volume. 14, Issue 2, 240204(2024)

Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor

Famei WANG1...2, Changrui LIAO1,2,*, Mengqiang ZOU1,2, Dejun LIU1,2, Haoqiang HUANG1,2, Chao LIU3, and Yiping WANG12 |Show fewer author(s)
Author Affiliations
  • 1Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
  • 2Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen 518060, China
  • 3School of Electronics Science, Northeast Petroleum University, Daqing 163318, China
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    References(35)

    [1] [1] M. Guix, J. Wang, Z. An, G. Adam, and D. J. Cappelleri, “Real-time force-feedback micromanipulation using mobile microrobots with colored fiducials,” IEEE Robotics and Automation Letters, 2018, 3(4): 3591–3597.

    [2] [2] H. Zhang, K. Wang, J. Li, J Li, R. Zhang, and Y. Zheng, “Liquid-based nanogenerator fabricated by a self-assembled fluoroalkyl monolayer with high charge density for energy harvesting,” Matter, 2022, 5(5): 1466–1480.

    [3] [3] Z. Xie, L. Yong, and J. Li, “Development and testing of an integrated smart tool holder for four-component cutting force measurement,” Mechanical Systems & Signal Processing, 2017, 93: 225–240.

    [4] [4] N. Khatibzade, A. B. Stilgoe, A. A. Bui, Y. Rocha, G. M. Cruz, V. Loke, et al., “Determination of motility forces on isolated chromosomes with laser tweezers,” Scientific Reports, 2014, 4(1): 1–9.

    [5] [5] M. S. Kim, J. R. Pratt, U. Brand, and C. W. Jones “Report on the first international comparison of small force facilities: a pilot study at the micronewton level,” Metrologia, 2011, 49(1): 70.

    [6] [6] Y. Ota, M. Ueki, and N. Kuramoto, “Evaluation of an automated mass comparator performance for mass calibration of sub-milligram weights,” Measurement, 2021, 172: 108841.

    [7] [7] K. T. Yoon, S. R. Park, and Y. M. Choi, “Electromagnetic force compensation weighing cell with magnetic springs and air bearings,” Measurement Science and Technology, 2020, 32(1): 015905.

    [8] [8] A. Iadicicco, M. D. Pietra, M. Alviggi, and S. Campopiano, “Deflection monitoring method using fiber Bragg gratings applied to tracking particle detectors,” IEEE Photonics Journal, 2014, 6(6): 1–10.

    [9] [9] L. Zhang, Y. Liu, X. Gao, and Z. Xia, “High temperature strain sensor based on a fiber Bragg grating and rhombus metal structure,” Applied Optics, 2015, 54(28): E109–E112.

    [10] [10] R. Li, Y. Chen, Y. Tan, Z. Zhou, T. Li, and J. Mao, “Sensitivity enhancement of FBG-based strain sensor,” Sensors, 2018, 18(5): 1607.

    [11] [11] Y. Chen, S. C. Yan, X. Zheng, F. Xu, and Y. Lu, “A miniature reflective micro-force sensor based on a microfiber coupler,” Optics Express, 2014, 22(3): 2443–2450.

    [12] [12] Q. Huang, J. Lee, F. T. Arce, I. Yoon, P. Angsantikul, and J. Liu, “Nanofibre optic force transducers with sub-piconewton resolution via near-field plasmon-dielectric interactions,” Nature Photonics, 2017, 11(6): 352–355.

    [13] [13] P. Youplao, M. Tasakorn, and T. Phattaraworamet, “The simulation of a force in micro-scale sensing employing an optical double ring resonator system,” Pertanika Journal of Science & Technology, 2018, 26(1).

    [14] [14] Y. Liu, S. Qu, W. Qu, and R. Que, “A Fabry-Pérot cuboid cavity across the fibre for high-sensitivity strain force sensing,” Journal of Optics, 2014, 16(10): 105401.

    [15] [15] Y. Wu, S. Xiao, Y. Xu, Y. Shen, Y. Jiang, W. Jin, et al., “Highly sensitive force sensor based on balloon-like interferometer,” Optics & Laser Technology, 2018, 103: 17–21.

    [16] [16] S. Pevec and D. Donlagic, “Miniature all-fiber force sensor,” Optics Letters, 2020, 45(18): 5093–5096.

    [17] [17] W. Bao, X. Li, F. Chen, R. Wang, X. Qiao, “Hyperelastic polymer fiber Fabry-Pérot interferometer for nanoforce measurement,” Journal of Lightwave Technology, 2022, 40(12): 4020–4026.

    [18] [18] C. Liao, D. Wang, and Y. Wang, “Microfiber in-line Mach-Zehnder interferometer for strain sensing,” Optics Letters, 2013, 38(5): 757–759.

    [19] [19] A. Sierakowski, D. Kopiec, W. Majstrzyk, P. Kunicki, P. Janus, R. Dobrowolski, et al., “Magnetoelectric versus thermal actuation characteristics of shear force AFM probes with piezoresistive detection,” Measurement Science and Technology, 2017, 28(3): 034011.

    [20] [20] Q. S. Sun, Z. X. Xue, Y. Chen, R. Xia, J. Wang, S. Xu, et al., “Modulation of the thermal transport of micro-structured materials from 3D printing,” International Journal of Extreme Manufacturing, 2022, 4: 015001.

    [21] [21] M. Q. Zou, C. R. Liao, S. Liu, C. Xiong, C. Zhao, J. Zhao, et al., “Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements,” Light: Science & Applications, 2021, 10(171): 2047–7538.

    [22] [22] C. R. Liao, C. Xiong, J. L. Zhao, M. Zou, Y. Zhao, B. Li, et al., “Design and realization of 3D printed fiber-tip microcantilever probes applied to hydrogen sensing,” Light: Advanced Manufacturing, 2022, 3(1): 3–13.

    [23] [23] I. Sakellari, S. Droulias, A. Lemonis, and E. I. Stratakis, “Femtosecond-laser-induced all-silicon dielectric metasurfaces assisted by wet chemical etching,” Ultrafast Science, 2023, 3: 0019.

    [24] [24] X. Chen and M. Gu, “Two-beam ultrafast laser scribing of graphene patterns with 90-nm subdiffraction feature size,” Ultrafast Science, 2022, 2022: 0001.

    [25] [25] J. H. Strickler and W. W. Webb, “Three-dimensional optical data storage in refractive media by two-photon point excitation,” Optics Letters, 1991, 16(22): 1780.

    [26] [26] M. H. Wang, K. H. Zhao, J. Y. Wu, Y. Li, Y. Yang, S. Huang, et al., “Femtosecond laser fabrication of nanograting-based distributed fiber sensors for extreme environmental applications,” International Journal of Extreme Manufacturing, 2021, 3(2): 025401.

    [27] [27] M. Malinauskas, A. Zukauskas, V. Purlys, K. Belazaras, A. Momot, D. Paipulas, et al., “Femtosecond laser polymerization of hybrid/integrated micro-optical elements and their characterization,” Journal of Optics, 2010, 12(12): 124010.

    [28] [28] M. Q. Zou, C. R. Liao, Y. P. Chen, L. Xu, S. Tang, G. Xu, et al., “3D printed fiber-optic nanomechanical bioprobe,” International Journal of Extreme Manufacturing, 2023, 5(1): 015005.

    [29] [29] C. Xiong, C. R. Liao, Z. Y. Li, M. Zhu, Y. Zhao, Y. Wang, “Optical fiber integrated functional micro-/nanostructure induced by two-photon polymerization,” Frontiers in Materials, 2020, 7: 586496.

    [30] [30] M. Q. Zou, C. R. Liao, Y. P. Chen, Z. Gan, S. Liu, D. Liu, et al., “Measurement of interfacial adhesion force with a 3D-printed fiber-tip microforce sensor,” Biosensors, 2022, 12(8): 629.

    [31] [31] C. P. Lang, J. D. Zhu, Y. Liu, Y. Li, and S. Qu, “Ultra compact full-angle-range direction-distinguishable tilt sensor based on fiber in-line polymer microcavity,” Journal of Lightwave Technology, 2022, 40(9): 3084–3089.

    [32] [32] M. Li, Y. Liu, X. L. Zhao, S. Qu, and Y. Li, “Miniature Pi-shaped polymer fiber tip for simultaneous measurement of the liquid refractive index and temperature with high sensitivities,” Journal of Optics, 2015, 17(10): 105701.

    [33] [33] P. Ji, M. Zhu, C. R. Liao, C. Zhao, K. Yang, C. Xiong, et al., “In-fiber polymer microdisk resonator and its sensing applications of temperature and humidity,” ACS Applied Materials & Interfaces, 2021, 13(40): 48119–48126.

    [34] [34] C. X. Li, Y. Liu, C. Lang, Y. Zhang, and S. Qu, “Femtosecond laser direct writing of a 3D microcantilever on the tip of an optical fiber sensor for on-chip optofluidic sensing,” Lab on a Chip, 2022, 22(19): 3734–3743.

    [35] [35] I. M. White and X. D. Fan, “On the performance quantification of resonant refractive index sensors,” Optics Express, 2008, 16(2): 1020–1028.

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    Famei WANG, Changrui LIAO, Mengqiang ZOU, Dejun LIU, Haoqiang HUANG, Chao LIU, Yiping WANG. Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor[J]. Photonic Sensors, 2024, 14(2): 240204

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    Paper Information

    Category: Regular

    Received: Aug. 8, 2023

    Accepted: Oct. 23, 2023

    Published Online: Jul. 24, 2024

    The Author Email: LIAO Changrui (cliao@szu.edu.cn)

    DOI:10.1007/s13320-024-0704-6

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