Photonic Sensors, Volume. 14, Issue 2, 240204(2024)

Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor

Famei WANG1...2, Changrui LIAO1,2,*, Mengqiang ZOU1,2, Dejun LIU1,2, Haoqiang HUANG1,2, Chao LIU3, and Yiping WANG12 |Show fewer author(s)
Author Affiliations
  • 1Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
  • 2Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen 518060, China
  • 3School of Electronics Science, Northeast Petroleum University, Daqing 163318, China
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    Benefiting from the great advances of the femtosecond laser two-photon polymerization (TPP) technology, customized microcantilever probes can be accurately 3-dimensional (3D) manufactured at the nanoscale size and thus have exhibited considerable potentials in the fields of microforce, micro-vibration, and microforce sensors. In this work, a controllable microstructured cantilever probe on an optical fiber tip for microforce detection is demonstrated both theoretically and experimentally. The static performances of the probe are firstly investigated based on the finite element method (FEM), which provides the basis for the structural design. The proposed cantilever probe is then 3D printed by means of the TPP technology. The experimental results show that the elastic constant k of the proposed cantilever probe can be actively tuned from 2.46 N/m to 62.35 N/m. The force sensitivity is 2.5 nm/μN, the Q-factor is 368.93, and the detection limit is 57.43 nN. Moreover, the mechanical properties of the cantilever probe can be flexibly adjusted by the geometric configuration of the cantilever. Thus, it has an enormous potential for matching the mechanical properties of biological samples in the direct contact mode.

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    Famei WANG, Changrui LIAO, Mengqiang ZOU, Dejun LIU, Haoqiang HUANG, Chao LIU, Yiping WANG. Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor[J]. Photonic Sensors, 2024, 14(2): 240204

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    Paper Information

    Category: Regular

    Received: Aug. 8, 2023

    Accepted: Oct. 23, 2023

    Published Online: Jul. 24, 2024

    The Author Email: LIAO Changrui (cliao@szu.edu.cn)

    DOI:10.1007/s13320-024-0704-6

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