Optics and Precision Engineering, Volume. 14, Issue 6, 939(2006)
Experimental investigation on a laser-produced plasma source with liquid aerosol spray target
References(3)
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[2] [2] BALLARD W P,BERNARDEZ L J,LAFON R E,et al.High-power laser-produced-plasma EUV source[J].SPIE,2002,4688:302-309.
[3] [3] KOMORI H,IMAI Y,SOUMAGNE G,et al.Magnetic field ion mitigation for EUV light sources[J].SPIE,2005,5751:859-866.
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[in Chinese]. Experimental investigation on a laser-produced plasma source with liquid aerosol spray target[J]. Optics and Precision Engineering, 2006, 14(6): 939
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