Optics and Precision Engineering, Volume. 21, Issue 9, 2326(2013)
Four-mode matching tri-axis silicon microgyroscope
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XIA Dun-zhu, KONG Lun, YU Cheng. Four-mode matching tri-axis silicon microgyroscope[J]. Optics and Precision Engineering, 2013, 21(9): 2326
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Received: Mar. 22, 2013
Accepted: --
Published Online: Sep. 25, 2013
The Author Email: Dun-zhu XIA (xiadz_1999@163.com)
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