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Optoelectronics Letters, Volume. 13, Issue 1, 42(2017)

Effects of Mg doping content and annealing temperature on the structural properties of Zn1-xMgxO thin films prepared by radio-frequency magnetron sputtering

Wen-han DU1...2, Jing-jing YANG1,*, Yu ZHAO1 and Chao XIONG1 |Show fewer author(s)
Author Affiliations
  • 1School of Electrical and Photoelectronic Engineering, Changzhou Institute of Technology, Changzhou 213002, China
  • 2National Laboratory of Physical Science atMicro Scale, University of Science and Technology of China, Hefei 230026, China
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    DU Wen-han, YANG Jing-jing, ZHAO Yu, XIONG Chao. Effects of Mg doping content and annealing temperature on the structural properties of Zn1-xMgxO thin films prepared by radio-frequency magnetron sputtering[J]. Optoelectronics Letters, 2017, 13(1): 42

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    Paper Information

    Category: Materials

    Received: Sep. 23, 2016

    Accepted: Oct. 10, 2016

    Published Online: Sep. 13, 2018

    The Author Email: Jing-jing YANG (493958322@qq.com)

    DOI:10.1007/s11801-017-6204-9

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology