Fig. 1. Diagram and photo of superconducting TES

Fig. 2. dT_C of fabricated titanium films as a function of R_S

Fig. 3. T_C of Ti and TiAu bilayer as a function of baking time and baking temperature

Fig. 4. α and β of Ti superconducting TES as a function of R₀/R_n，and T_C dependence of ∆E_FWHM

Fig. 5. Optical cavity and histogram of 1 550 nm superconducting TES single-photon detector

Fig. 6. multiphoton response of superconducting TES and setup of single-photon emission