Optical coherence tomography (OCT) is an novel optical signal acquisition and processing method which can capture micrometer-resolution three-dimensional images from optical scattering media. Monocrystalline silicon wafers obtained with different texturing time and same corrosion solution are measured by sweep light source OCT. Through processing the OCT acquired data, the quality of monocrystalline silicon in different texturing time can be estimated. It may provide a new method for the test of textured monocrystalline silicon.