Semiconductor Optoelectronics, Volume. 45, Issue 2, 188(2024)
Dynamic Response Optimization of MEMS Electrostatic Actuator Based on Variable Stiffness Cantilever Beam
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GAO Yufan, DAI Xuhan, WANG Huaizhi, ZHANG Zhuoer, DING Guifu. Dynamic Response Optimization of MEMS Electrostatic Actuator Based on Variable Stiffness Cantilever Beam[J]. Semiconductor Optoelectronics, 2024, 45(2): 188
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Received: Dec. 26, 2023
Accepted: --
Published Online: Aug. 14, 2024
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