Semiconductor Optoelectronics, Volume. 42, Issue 1, 30(2021)

Biomimetic Hair Flow Sensor Based on Bi-stable Potential Energy Adjustment

LIANG Helong1...2, LIU Wu1, XU Haijun1,2, and ZI Peng12 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(8)

    [1] [1] Casas J, Liu C, Krijnen G. Biomimetic Flow Sensors. In: Bhushan B. (eds) Encyclopedia of Nanotechnology[M]. Dordrecht: Springer, 2012: 264-276.

    [3] [3] Ozaki Y, Ohyama T, Yasuda T, et al. An air flow sensor modeled on wind receptor hairs of insects[C]// Proc. of IEEE 13th Annual Inter. Conf. on Micro Electro Mechanical Systems, 2000: 531-536.

    [4] [4] Van J J B, Dijkstra M, Wiegerink R J, et al. Fabrication of arrays of artificial hairs for complex flow pattern recognition[C]// Proc. of IEEE Sensors, 2003: 332-336.

    [5] [5] Bruinink C M, Jaganatharaja R K, De Boer M J, et al. Advancement in technology and design of biomimetic flow-sensor arrays[C]// IEEE 22nd Inter. Conf. on Micro Electro Mechanical Systems, 2009: 152-155.

    [6] [6] Harmen D, Christiaan B, Remco S, et al. Tunable sensor response by voltage-control in biomimetic hair flow sensors[J]. Micromachines, 2013, 4(1): 116-127.

    [7] [7] Ajay K, Meghali B, Elgar K, et al. Cupula-inspired hyaluronic acid-based hydrogel encapsulation to form biomimetic MEMS flow sensors[J]. Sensors, 2017, 17(8): 1728.

    [9] [9] Yang B, Guo X, Wang Q H, et al. A novel flow sensor based on resonant sensing with two-stage microleverage mechanism[J]. Rev. Sci. Instrum., 2018, 89: 045002.

    [11] [11] Droogendijk H, De Boer M J, Sanders R G P, et al. Stochastic resonance in a voltage-controlled micromechanical slider[J]. J. of Microelectromechanical Systems, 2015, 24(3): 651-660.

    Tools

    Get Citation

    Copy Citation Text

    LIANG Helong, LIU Wu, XU Haijun, ZI Peng. Biomimetic Hair Flow Sensor Based on Bi-stable Potential Energy Adjustment[J]. Semiconductor Optoelectronics, 2021, 42(1): 30

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Nov. 16, 2020

    Accepted: --

    Published Online: Mar. 18, 2021

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2021.01.005

    Topics