Fig. 1. Schematic diagram of X-ray detection

Fig. 2. Schematic structure of two silicon microchannel array (SMA) based CsI:Tl scintillation screens

Fig. 3. SMA-based 3D geometric models of CsI:Tl scintillation screen

Fig. 4. Variation of the number of generated scintillation photons with the thickness of the scintillation screen

Fig. 5. Variation of scintillation photon number with X-ray energy

Fig. 6. Relationship between BLO and thickness of scintillation screen

Fig. 7. Transmission efficiency versus scintillation screen thickness

Fig. 8. Number of scintillating photons subjected to n total reflections as a proportion of the total number of scintillating photons

Fig. 9. MTF versus spatial resolution for CsI:Tl flicker screens

Fig. 10. SEM image of SMA

Fig. 11. Schematic diagram of X ray equipment

Fig. 12. Data processing of edge method

Fig. 13. Relationship between MTF and spatial resolution of sample wafers