Fig. 1. Raman spectra of Dy³⁺ single doped AlN film samples

Fig. 2. XRD patterns of AlN: Dy³⁺ samples at different implanted doses

Fig. 3. CL spectra of AlN: Dy³⁺ with different Dy³⁺ implanted fluence

Fig. 4. The CL spectra of AlN: Dy³⁺, Eu³⁺ samples

Fig. 5. Energy-level of Eu³⁺ and Dy³⁺ in AlN and energy transfer model between Eu³⁺ and Dy³⁺

Fig. 6. Coordinates of luminescence colorimetry of AlN: Dy³⁺, Eu³⁺ with different Eu³⁺ implanted doses (CIE1903)