Journal of Inorganic Materials, Volume. 37, Issue 5, 507(2022)

Fabrication of 1-3 Piezocomposites via Soft Mold Method for High-frequency Ultrasound Transducer

Junting TIAN1... Xiaobing LI1,*, Weiyan DING1, Shengdong NIE1 and Zhu LIANG2 |Show fewer author(s)
Author Affiliations
  • 11. School of Health Science and Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 22. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
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    References(20)

    [1] W MA X, W CAO W. Single crystal high frequency intravascular ultrasound transducer with 40 micron axial resolution. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 67, 810-816(2020).

    [2] S LI, J TIAN, X JIANG. A micromachined PMN-PT single crystal composite circular array for intravascular ultrasound imaging. Journal of Engineering and Science in Medical Diagnostics and Therapy, 2, 021001(2019).

    [3] L XU J, Z ZHANG, X LIU S et al. Optimizing the piezoelectric vibration of Pb(Mg1/3Nb2/3)O3-0.25PbTiO3 single crystal by alternating current polarization for ultrasonic transducer. Applied Physics Letters, 116, 202903(2020).

    [4] A SMITH W, A AULD B. Modeling 1-3 composite piezoelectrics: thickness-mode oscillations. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 38, 40-47(1991).

    [5] S LEE J, Y MOON J, H CHANG J. A 35 MHz/105 MHz dual-element focused transducer for intravascular ultrasound tissue imaging using the third harmonic. Sensors, 18, 2290(2018).

    [6] D ZHOU, F CHEUNG K, Y CHEN. et al. Fabrication and performance of endoscopic ultrasound radial arrays based on PMN-PT single crystal/epoxy 1-3 composite. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 58, 477-484(2011).

    [7] S WANG J, Z CHEN M, Y ZHAO X et al. Fabrication and high acoustic performance of high frequency needle ultrasound transducer with PMN-PT/Epoxy 1-3 piezoelectric composite prepared by dice and fill method. Sensors and Actuators A: Physical, 318, 112528(2021).

    [8] H CHEN R, L LAN C. Fabrication of high-aspect-ratio ceramic microstructures by injection molding with the altered lost mold technique. Journal of Microelectromechanical Systems, 10, 62-68(2001).

    [9] D CERTON, F PATAT, F LEVASSORT. Lateral resonances in 1-3 piezoelectric periodic composite: modeling and experimental results. Journal of the Acoustical Society of America, 101, 2043-2051(1997).

    [10] A BENT A, W HAGOOD N. Piezoelectric fiber composites with interdigitated electrodes. Journal of Intelligent Material Systems and Structures, 8, 903-919(1997).

    [11] N WANG S, F LI J, R WATANABE et al. Fabrication of lead zirconate titanate microrods for 1-3 piezocomposites using hot isostatic pressing with silicon molds. Journal of the American Ceramic Society, 82, 213-215(2004).

    [12] N WANG S, F LI J, H LI X. Processing of PZT microstructures. Sensors and Materials, 10, 375-384(1998).

    [13] Z DONG Y, Y ZHOU Z, H LIANG R. Correlation between the grain size and phase structure, electrical properties in BiScO3-PbTiO3-based piezoelectric ceramics. Journal of the American Ceramic Society, 103, 4785-4793(2020).

    [14] J PENG, S LUO H, H HE T. Elastic, dielectric, and piezoelectric characterization of 0.70Pb(Mg1/3Nb2/3)O3-0.30PbTiO3 single crystals. Materials Letters, 59, 640-643(2005).

    [15] G LIU C, F DJUTH, F ZHOU Q. Micromachining techniques in developing high-frequency piezoelectric composite ultrasonic array transducers. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 60, 2615-2625(2013).

    [16] M CANNATA J, A RITTER T, H CHEN W. Design of efficient, broadband single-element (20-80 MHz) ultrasonic transducers for medical imaging applications. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 50, 1548-1557(2003).

    [17] R FANG R, Y ZHOU Z, H LIANG R et al. Effects of CuO addition on the sinterability and electric properties in PbNb2O6- based ceramics. Ceramics International, 46, 23505-23509(2020).

    [18] M ZIPPARO, K SHUNG K, R SHROUT T. Piezoceramics for high-frequency (20 to 100 MHz) single-element imaging transducers. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 44, 1038-1048(1997).

    [19] R KRIMHOLTZ, A LEEDOM D, L MATTHAEI G. New equivalent circuits for elementary piezoelectric transducers. Electronics Letters, 6, 398-399(1907).

    [20] F ZHOU Q, C XU X, J GOTTLIEB E. PMN-PT single crystal, high-frequency ultrasonic needle transducers for pulsed- wave Doppler application. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 54, 668-675(2007).

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    Junting TIAN, Xiaobing LI, Weiyan DING, Shengdong NIE, Zhu LIANG. Fabrication of 1-3 Piezocomposites via Soft Mold Method for High-frequency Ultrasound Transducer[J]. Journal of Inorganic Materials, 2022, 37(5): 507

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    Paper Information

    Category: RESEARCH ARTICLE

    Received: May. 6, 2021

    Accepted: --

    Published Online: Jan. 10, 2023

    The Author Email: LI Xiaobing (xiaobing@usst.edu.cn)

    DOI:10.15541/jim20210282

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