Acta Optica Sinica, Volume. 40, Issue 15, 1522002(2020)
Design of Reflective Projection Optics Used in Lithographic Focusing and Leveling System
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Shengsheng Sun, Dan Wang, Yuejing Qi, Mingcheng Zong. Design of Reflective Projection Optics Used in Lithographic Focusing and Leveling System[J]. Acta Optica Sinica, 2020, 40(15): 1522002
Category: Optical Design and Fabrication
Received: Mar. 26, 2020
Accepted: May. 6, 2020
Published Online: Aug. 14, 2020
The Author Email: Sun Shengsheng (sunshengsheng@ime.ac.cn), Zong Mingcheng (zongmingcheng@ime.ac.cn)