Acta Photonica Sinica, Volume. 54, Issue 2, 0231002(2025)
High Precision Testing of Optical Homogeneity of Large Aperture Infrared Materials Based on Beam Expansion and Auxiliary Measurement
Figures & Tables(10)
Fig. 2. Optical homogeneity measurement system of large aperture infrared materials based on beam expansion
Fig. 3. Four-step interferometry based on beam expansion and auxiliary measurement
Fig. 4. The optical homogeneity testing experiment of the large aperture infrared material
Fig. 5. The measurement results of the homogeneity of small aperture sample
Fig. 6. The measurement results of the four-step interferometry based on beam expansion and auxiliary measurement
Table 1. Homogeneity measurement results of infrared materials
View tableView in ArticleTable 1. Homogeneity measurement results of infrared materials
Number Material Size/mm Homogeneity results d·Δn（x， y） PV/nm RMS/nm Homogeneity 1# SI Ф360×47 
6 907.767 981.453 1.47×10-4 2# GE Ф350×50 
7 855.100 1 409.149 1.57×10-4 3# SI Ф380×82 
7 841.651 1 174.380 9.56×10-5 4# GE Ф380×70 
6 723.721 822.957 9.61×10-5
Table 2. The measurement repeatability
View tableView in ArticleTable 2. The measurement repeatability
Measurement repeatability ΔW1 ΔW2 ΔW3 ΔW4 PV value（λ=3.39 μm） 0.03λ 0.05λ 0.02λ 0.01λ
Table 3. Measurement uncertainty analysis
View tableView in ArticleTable 3. Measurement uncertainty analysis
Number Uncertainty component Measurement
uncertainty
（Ge d=50 mm）
Measurement
uncertainty
（Ge d=70 mm）
Measurement
uncertainty
（Si d=47 mm）
Measurement
uncertainty
（Si d=82 mm）
1 Measurement repeatability 1.7×10-5 1.2×10-5 1.6×10-5 8.9×10-6 2 Pixel deviation 4.0×10-7 4.0×10-7 4.0×10-7 4.0×10-7 3 Thickness error 2.0×10-8 1.4×10-8 2.1×10-8 1.2×10-8 4 Refractive index error 2.5×10-8 2.5×10-8 2.9×10-8 2.9×10-8 Combined uncertainty 1.7×10-5 1.2×10-5 1.6×10-5 8.9×10-6 Expanded uncertainty（k=2） 3.4×10-5 2.4×10-5 3.2×10-5 1.8×10-5
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Weijian LIU, Yang HUANG, Shengjie ZHANG, Junru SONG, Chao ZHANG, Yi JI, Qun YUAN. High Precision Testing of Optical Homogeneity of Large Aperture Infrared Materials Based on Beam Expansion and Auxiliary Measurement[J]. Acta Photonica Sinica, 2025, 54(2): 0231002
Paper Information
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Received: Jul. 23, 2024
Accepted: Sep. 5, 2024
Published Online: Mar. 25, 2025
The Author Email: LIU Weijian (liuweijian954@163.com)
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