Chinese Optics Letters, Volume. 13, Issue 4, 041102(2015)

Alignment methods for micron-scale surface defects automatic evaluation of large-aperture fine optics

Pin Cao, Yongying Yang*, Chen Li, Huiting Chai, Yang Li, Shibin Xie, and Dong Liu
Author Affiliations
  • State Key Laboratory of Modern Optical Instrumentation, Department of Optical Engineering, Zhejiang University, Hangzhou 310027, China
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    Figures & Tables(9)
    Principle of SDES.
    Sub-aperture (a) sampling and (b) stitching with coordinate error.
    Performance of SLCA.
    Edge images that are sampled at high magnification; (a) in-focus edge image; (b) estimated boundary line of a defocus edge image.
    Cropped edge images the focus curves; (a) cropped edge images that are sampled by the step length of 50 μm; (b) fitted focus curves of edge images.
    Spatial relation model of defocus depths and leveling mechanism.
    Sub-apertures (a) A11 and (b) A1i, collected for coordinate consistency error adjusting.
    Sub-aperture array stitching result, 3×3, after SLCA; (a) stitching before adjustment; (b) stitching after adjustment.
    Large-aperture stitching result; 320 mm×320 mm.
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    Pin Cao, Yongying Yang, Chen Li, Huiting Chai, Yang Li, Shibin Xie, Dong Liu. Alignment methods for micron-scale surface defects automatic evaluation of large-aperture fine optics[J]. Chinese Optics Letters, 2015, 13(4): 041102

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    Paper Information

    Category: Imaging Systems

    Received: Nov. 27, 2014

    Accepted: Feb. 12, 2015

    Published Online: Sep. 21, 2018

    The Author Email: Yongying Yang (chuyyy@zju.edu.cn)

    DOI:10.3788/COL201513.041102

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