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Optics and Precision Engineering, Volume. 18, Issue 2, 363(2010)

Fabrication of 3D metal microstructure based on UV-LIGA and micro-EDM technology

DU Li-qun1...2,*, MO Shun-pei1, ZHANG Yu-sheng2, and LIU Chong12 |Show fewer author(s)
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    DU Li-qun, MO Shun-pei, ZHANG Yu-sheng, LIU Chong. Fabrication of 3D metal microstructure based on UV-LIGA and micro-EDM technology[J]. Optics and Precision Engineering, 2010, 18(2): 363

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    Paper Information

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    Received: Jul. 16, 2009

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: Li-qun DU (duliqun@dlut.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology