Fig. 1. Working principle and typical system composition of FMCW LiDAR based on OPA

Fig. 2. Working diagram of OPA

Fig. 3. (a) Schematic diagram of MIT’s solid-state LiDAR system; (b) The chip is placed on the coin; (c) Optical micrograph of the device; (d) Packaged system with epoxied fiber^[27]

Fig. 4. (a) 512-element OPA; (b) Real-time data from a 3D LiDAR system (color is representative of range); (c) Map of outdoor scene scanned by 2D LiDAR system; (d) Real-time visualization of output LiDAR data showing detections at a 185 m range ^[28]

Fig. 5. (a) Schematic diagram of MIT’s on-chip integrated LiDAR system; (b) Micrograph of the 128-channel LiDAR^[29]

Fig. 6. Micrograph of 256-channel on-chip integrated FMCW LiDAR system^[30]

Fig. 7. Beam performance and ranging experiment of 256-channel FMCW LiDAR system^[30]

Fig. 8. (a) Integrated diagram of 8192-element OPAs and CMOS chips; (b) Photograph of packaged chip in housing; (c) 300 mm photonics wafer with OPAs; (d) SEM of CMOS flipped onto PIC^[31]

Fig. 9. (a) Analog Photonics’ OPA LiDAR system; (b) LiDAR point cloud; (c) Point cloud overlay taken outdoors^[31]

Fig. 10. (a) Optical microscope of 64-channel OPA; (b) FMCW ranging system with this chip^[33]

Fig. 11. (a) 512-channel OPA; (b) The beginning of the chirped grating antenna; (c) The end of the chirped grating antenna; (d) The beginning of the uniform grating antenna; (e) The end of the uniform grating antenna^[34]

Fig. 12. (a) Schematic diagram of the OPA chip; (b) Optical micrograph image of the OPA chip; (c) Chip vs coin size comparison; (d) Picture of the packaged chip^[35]

Fig. 13. (a) Microscope photograph of the fabricated 32-channel dispersive OPA; (b) FMCW experimental system based on dispersion OPA^[36]

Fig. 14. (a) Schematic structure of the LiDAR transmitter on the multi-layer Si₃N₄ on SOI platform; (b) Packaging process of the device; (c) Picture of the packaged chip^[37]

Fig. 15. (a) SJTU’s experiment setup for the FMCW ranging; (b) Beat signal spectra with different delay fiber lengths; (c) Linear regression of the peak frequencies of the beat signals vs the extended fiber lengths^[37]

Fig. 16. (a) Interdigital waveguide grating antenna array; (b) FMCW LiDAR system diagram

Fig. 17. (a) Intelligent drive; (b) Aerospace; (c) Target monitor; (d) Public safety

Fig. 18. Photoelectric hybrid integrated FMCW LiDAR architecture

Fig. 19. Low loss on-chip integrated FMCW LiDAR

Fig. 20. Multi-channel parallel signal processing system architecture

Fig. 21. Intelligent sensing and computing integrated architecture