Optics and Precision Engineering, Volume. 16, Issue 3, 505(2008)

Nanoscale measurement of MEMS in-plane motion based on block matching

[in Chinese]... [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    References(4)

    [1] [1] DAVIS C Q,FREEMAN D M.Using a light microscope to measure motions with nanometer accuracy[J].Optical Engineering,1998,37:1299-1304.

    [2] [2] REMBE C,KANT R,MULLER R S.Optical measurement methods to study dynamic behavior in MEMS[C].Microsystems Engineering:Metrology and Inspection,Bellingham(USA):Proc SPIE,2001:127-137.

    [3] [3] HEMMERT W,MERMELSTEIN M S,FREEMAN D M.Nanometer resolution of three-dimensional motions using video interference microscopy[C].IEEE International MEMS99,Orlando FL,1999.

    [13] [13] CONTE S D,BOOR C D.Elementary Numerical Analysis-an Algorithmic Approach[M].New York:McGraw-Hill,1980.

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Nanoscale measurement of MEMS in-plane motion based on block matching[J]. Optics and Precision Engineering, 2008, 16(3): 505

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Aug. 30, 2007

    Accepted: --

    Published Online: Jul. 8, 2008

    The Author Email:

    DOI:

    Topics