Optics and Precision Engineering, Volume. 16, Issue 3, 505(2008)
Nanoscale measurement of MEMS in-plane motion based on block matching
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Nanoscale measurement of MEMS in-plane motion based on block matching[J]. Optics and Precision Engineering, 2008, 16(3): 505
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