[1] [1] ZHAO B, HAO D F. Manufacturing large-size grating by mosaic way[J]. Opt. Precision Eng., 2000,8(5):503-507. (in Chinese)

[2] [2] YANG X D, XIA L, MA W X. Experiment of real-time monitoring and adjusting of rotation error about tiled gratings[J]. Chinese Journal of Lasers, 2007,34(9):1222-1226. (in Chinese)

[3] [3] ZHANG T J,YONEMURA M,KATO Y. An array-grating compressor for high-power chirped-pulse amplification lasers[J]. Optics Communications, 1998,145(1-6): 367-376.

[4] [4] ZHANG SH, HEISEL U. Parallel kinematics machine tool[M]. Beijing: China Machine Press, 2003:35-56. (in Chinese)

[5] [5] HUANG X G, LIAO Q Z, LI D L. Forward displacement analysis of generalized 5SPS-1CCS parallel robot mechanism based on quaternion[J]. Chinese Journal of Mechanical Engineering, 2007,43(5):8-13. (in Chinese)

[6] [6] WEN F, LIANG C G. Displacement analysis of the 6-6 Stewart platform mechanism[J]. Mechanism and Machine Theory, 1994,29(4):547-557.

[7] [7] GAO X S, LEI D L, LIAO Q Z. Generalized stewart-Gough platforms and their direct kinematics[J]. IEEE Trans. Robotics, 2005,21(2): 141-151.

[8] [8] RAGHAVAN M. The stewart platform of general geometry has 40 configurations[J]. ASME J. Mech. Des., 1993,115(1): 227-282.

[9] [9] CAI Z X. Robotics[M]. Beijing: Tsinghua University Press, 2000: 46-53. (in Chinese)

[10] [10] JIE D G, LIU Y J, SUN L N. Modeling and control of a macor-micro dual-drive ultra-precision positioning mechanism[J]. Opt. Precision Eng., 2005,13(2): 171-178. (in Chinese)

[11] [11] LI Y, ZHOU X G, GAN D M. Configurable analysis and kinematics simulation of the new 6-CCS parallel mechanism[J]. New Technology & New Process, 2006(12): 33-35. (in Chinese)

[12] [12] ZHANG X F, SUN L N. Research of precise parallels robot control method and system[J]. Chinese Journal of Mechanical Engineering,2004,40(4):177-180. (in Chinese)

[13] [13] GAO L, KAN S S, LI M. Rotation-angle-accuracy measurement of piezo tilt platform[J]. Opt. Precision Eng., 2007,15(2):206-211. (in Chinese)

[14] [14] ZHANG Q, LU Z SH. Modeling and simulation of macro/micro feed drive control system[J]. Journal of Mechanical Transmission, 2006,30(4):16-19. (in Chinese)