A mechanical grating tiling device is designed by a macro-micro dual-drive parallel mechanism with a few Degrees of Freedom(DOF). The raster matching device is composed of a macro-moving part using a step-motor controlled ballscrew unit(a 5PTS-1PPS parallel mechanism)and a micro-moving part using a piezoelectric ceramics controlled flexure hinge(a 5TSP-1PPS parallel mechanism) in series. The DOFs for the macro-moving part and the micro-moving part have been calculated and the control algorithms are deduced through inversing dynamics of parallel mechanism. Then, the point-point controls of the macro-moving part and the micro-moving part are simulated subsequently. In order to improve positioning precision of this mechanism, system errors have been analyzed and modified. Finally, above control algorithms are applied to the grating tiling device and experimental results indicate that the maximum linear location error is 3.6 μm and the maximum rotation error is 4.4 μrad for the macro-moving part; the 0.06 μm and 1.2 μrad for the micro-moving part,obtained data can meet the precision requirement of grating tiling system.