Optics and Precision Engineering, Volume. 31, Issue 12, 1761(2023)

On-line six-degree-of-freedom errors measurement and compensation for XY stages

Rongwei LIN... Zhenying CHENG*, Yaxiong HE, Jie LI and Ruijun LI |Show fewer author(s)
Author Affiliations
  • Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,School of Instrument Science and Opto-electronic Engineering,Hefei University of Technology,Hefei230009,China
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    Rongwei LIN, Zhenying CHENG, Yaxiong HE, Jie LI, Ruijun LI. On-line six-degree-of-freedom errors measurement and compensation for XY stages[J]. Optics and Precision Engineering, 2023, 31(12): 1761

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Nov. 16, 2022

    Accepted: --

    Published Online: Jul. 25, 2023

    The Author Email: CHENG Zhenying (chengzhenying01@hfut.edu.cn)

    DOI:10.37188/OPE.20233112.1761

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