Acta Photonica Sinica, Volume. 40, Issue 1, 9(2011)
Structure and Surface Roughness of AlN Thin Films Grown Processing by Direct Current Magnetron Sputtering
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ZOU Wen-xiang, LAI Zhen-quan, LIU Wen-xing. Structure and Surface Roughness of AlN Thin Films Grown Processing by Direct Current Magnetron Sputtering[J]. Acta Photonica Sinica, 2011, 40(1): 9
Paper Information
Received: Jul. 7, 2010
Accepted: --
Published Online: Mar. 8, 2011
The Author Email: Zhen-quan LAI (zqlai@ncu.edu.cn)
CSTR:32186.14.
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