Fig. 1. Optical path of multi-wavelength polarization Mirau interference microscope for micro profile transient measurement

Fig. 2. Multi wavelength correction fringe order process

Fig. 3. Schematic pixel layout of color polarization camera

Fig. 4. Schematic of device prototype

Fig. 5. Measurement result of standard step

Fig. 6. Phase shift interferometric fringe patterns of R，G and B channels

Fig. 7. Microcosmic profile measurement results

Fig. 8. Surface roughness measurement results