Fig. 1. g value versus incident angle when σ=0.2 μm and λ=0.6 μm

Fig. 2. Schematic of experimental device with established device in laboratory shown in bottom-right corner

Fig. 3. Photograph of TA15 sample

Fig. 4. Spectra of sample surface in different cleaning areas. (a) Spectrum of incident light and reflection spectrum of each zone; (b) I₀/I_s of each zone versus 1/λ²

Fig. 5. Reflective absorption spectrum of each zone

Fig. 6. Imaging maps for three different characterization values of TA15 sample obtained by automatic measurement. (a) σ_g value; (b) R² value; (c) ratio of absorption intensity at 420 nm to that at 790 nm