Fig. 1. MTF distribution of CMOS image sensor with different shape sensitivity apertures. (a) Rhomb-shaped active area; (b) hexagon-shaped active area; (c) circular-shaped active area; (d) rectangular-shaped active area

Fig. 2. Aperture MTF of CMOS detector. (a) Sensitivity profile of pixel; (b) 3D distribution of aperture MTF; (c) 2D distribution of aperture MTF

Fig. 3. Light absorption coefficient of silicon material varies with wavelength

Fig. 4. Pixel structure of P-type substrate superimposed P-type epitaxial layer in CMOS process and diffusion MTF. (a) Pixel structure; (b) diffusion MTF increases with the decrease of incident light wavelength

Fig. 5. QE and SNR with the change of the input wavelength. (a) QE line; (b) SNR lines