Optics and Precision Engineering, Volume. 32, Issue 11, 1667(2024)
Design and characterization of microlens arrays for InGaAs single photon detectors
Figures & Tables(16)
Fig. 3. Schematic diagram of duty cycle of square aperture microlens
Fig. 5. Relationship curves between curvature， thickness and Airy spot radius of two types of microlens arrays
Table 1. Focal plane parameters
View tableView in ArticleTable 1. Focal plane parameters
参 数 InGaAs APD-1 InGaAs APD-2 焦平面材料 InP InP 响应波长 1.064 μm 1.064 μm 衬底厚度 260 μm 260 μm 光敏区尺寸 Φ10 μm 25 μm×25 μm 光敏区间隔 50 μm 100 μm
Table 2. Comparison of refractive index and transmittance of commonly used microlens materials
View tableView in ArticleTable 2. Comparison of refractive index and transmittance of commonly used microlens materials
材料 折射率 透过率 GaP 3.173 2 1 Si 3.554 8 0.783 58 InP 3.257 4 1.758 0×10-8 Al2O3 1.616 5 1
Table 3. Structural parameters of two microlens designs
View tableView in ArticleTable 3. Structural parameters of two microlens designs
材料 冠高/μm 孔径/μm 曲率/μm 折射率 厚度/μm GaP 0.70 45.00 362 3.17 290 Si 3.00 95.00 378 3.55 250
Table 4. Simulation results of two microlenses
View tableView in ArticleTable 4. Simulation results of two microlenses
材 料 RMS半径/μm 艾里斑半径/μm 能量集中度/% 0° 2.5° 5° GaP 0.321 0.329 0.354 4.951 83.71 Si 0.169 0.177 0.201 2.015 97.21
Table 5. Parameters of two microlens morphology
View tableView in ArticleTable 5. Parameters of two microlens morphology
材料 冠高 孔径 曲率 厚度 理想焦距 测试焦距 GaP 0.691 45.03 367 240 334 315 Si 3.00 96.65 391 293 362 352
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Chenyang ZHANG, Defeng MO, Hongyan XU, Yingjie MA, Yi GU, Xue LI, Wenxian SU. Design and characterization of microlens arrays for InGaAs single photon detectors[J]. Optics and Precision Engineering, 2024, 32(11): 1667
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Received: Jan. 8, 2024
Accepted: --
Published Online: Aug. 8, 2024
The Author Email: SU Wenxian (digestsu@163.com)
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