The integrated application of microlens and detector chip can improve the efficiency of light energy utilization of the detector and thus increase the sensitivity of the detector. For two kinds of InP-based InGaAs single-photon infrared detectors， two kinds of square aperture microlens arrays with materials of GaP and Si are designed respectively. The design process of the structural parameters of the microlens arrays is introduced and the design points of each step are analyzed. The structural parameters of the designed microlens arrays are simulated and calibrated by ray tracing software， which determines that the two microlens arrays meet the design requirements. The morphology of the two fabricated microlens arrays was examined using a step meter and a confocal microscope. The curvature deviations of the two microlens arrays were calculated to be 1.38% and 3.44%， respectively. The focal lengths of two microlens arrays in air at 1.064 μm wavelength were tested experimentally， and the focal deviations of 5.69% and 2.76% were obtained in comparison with the simulated results. By analyzing the manufacturing process of microlenses， the two deviations meet the application requirements.