Heat accumulation effects in femtosecond laser-induced subwavelength periodic surface structures on silicon

Qiang Fu; Jing Qian; Guande Wang; Quanzhong Zhao

doi:10.3788/COL202321.051402

Chinese Optics Letters, Volume. 21, Issue 5, 051402(2023)

Heat accumulation effects in femtosecond laser-induced subwavelength periodic surface structures on silicon Editors' Pick

Qiang Fu^1,2, Jing Qian^1,2, Guande Wang^1,2, and Quanzhong Zhao^1,2、*

Author Affiliations

¹State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-intense Laser Science, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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Qiang Fu, Jing Qian, Guande Wang, Quanzhong Zhao. Heat accumulation effects in femtosecond laser-induced subwavelength periodic surface structures on silicon[J]. Chinese Optics Letters, 2023, 21(5): 051402

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Paper Information

Category: Lasers, Optical Amplifiers, and Laser Optics

Received: Dec. 7, 2022

Accepted: Feb. 8, 2023

Published Online: May. 10, 2023

The Author Email: Quanzhong Zhao (zqz@siom.ac.cn)

DOI:10.3788/COL202321.051402

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology