Acta Photonica Sinica, Volume. 52, Issue 10, 1052414(2023)

On-chip Mid-infrared Indium Gallium Arsenic Suspended Waveguide Gas Sensors

Xueying WANG1...2, Zhening ZHANG1,2, Mingquan PI1,2, Zihang PENG1,2, Chuantao ZHENG1,2, Fang SONG1,2, Yue YANG1,2,*, and Yiding WANG12 |Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of Integrated Optoelectronics,Jilin University Region,College of Electronic Science and Engineering,Jilin University,Changchun 130012,China
  • 2Jilin Provincial Engineering Research Center of Infrared Gas Sensing Technique,Changchun 130012,China
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    Figures & Tables(13)
    The simulated absorption spectra of CO and H2O near 4 602.5 nm(T = 293 K,P = 101 325 Pa,L =1 cm),where the CO concentration is 100% and the H2O concentration is 2%
    Structure and optical field of the HPCW
    Optimization of HPCW plate structure
    Optimization of HPCW lattice constant
    Plot of S versus L,where αint = 27.5 dB/cm for HPCW
    Structure and optical field of the RWG
    Structure optimization of the panel of ridge waveguide
    Ridge structure optimization of ridge waveguide
    Plot of S versus L,where αint=3 dB/cm for RWG
    Plots of Lopt and CLoD versus αint
    • Table 1. Optimized parameters of the suspended InGaAs HPCW sensor at 4.602 5 μm

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      Table 1. Optimized parameters of the suspended InGaAs HPCW sensor at 4.602 5 μm

      Parameters of HPCW sensorValue
      a1 018 nm
      W13a
      hInGaAs1.15 μm
      r0.27a
      rs0.6r
      Lopt72 μm
    • Table 2. Optimized parameters of the suspended InGaAs RWG sensor at 4.602 5 μm

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      Table 2. Optimized parameters of the suspended InGaAs RWG sensor at 4.602 5 μm

      Parameters of RWG sensorValue
      w24 μm
      h2405 nm
      w11 μm
      h1315 nm
      Lopt162 μm
    • Table 3. Comparison between the suspended InGaAs HPCW and the suspended InGaAs RWG

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      Table 3. Comparison between the suspended InGaAs HPCW and the suspended InGaAs RWG

      Waveguide typeHPCWRWG
      TE/TM mode guidingTETM
      ng43.974.89
      fPC250.69%115.65%
      CLoD9.13×10-68.51×10-6
      Propagation loss27.5 dB/cm3 dB/cm
      Polarization rotatorRequired
      Lopt72 μm162 μm
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    Xueying WANG, Zhening ZHANG, Mingquan PI, Zihang PENG, Chuantao ZHENG, Fang SONG, Yue YANG, Yiding WANG. On-chip Mid-infrared Indium Gallium Arsenic Suspended Waveguide Gas Sensors[J]. Acta Photonica Sinica, 2023, 52(10): 1052414

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    Paper Information

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    Received: Aug. 14, 2023

    Accepted: Oct. 12, 2023

    Published Online: Dec. 5, 2023

    The Author Email: YANG Yue (yangyue@jlu.edu.cn)

    DOI:10.3788/gzxb20235210.1052414

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