Acta Photonica Sinica, Volume. 41, Issue 10, 1247(2012)
Influence of the Oxygen Flow on TiO2 Thin Films Prepared by DC Magnetron Sputtering
[1] [1] DUMITRIU D, BALLY A R, BALLIF C, et al. Photocatalytic degradation of phenol by TiO2 thin films prepared by sputtring [J].Applied Catalysis B: Environmental, 2000, 25(25): 83-92.
[2] [2] HU An-ming, ZHANG Xu, PNEG Peng, et al. Hydrothermal growth of free standing TiO2 nanowire membranes for photocatalytic degradation of pharmaceuticals[J].Journal of Hazardous Materials, 2011, 189(1): 278-285.
[3] [3] ZHENG Zi-yao, WANG Zhu, LI Chun-ling, et al. Magnetron sputtering deposition Low-E film and AFM analysis[J].Semiconductor Optoelectronic, 2005, 26(5): 418.
[4] [4] HARIZANOVA A, KOUTZAROVA T. Preparation and characterization of ZnO-TiO2 films obtained by sol-gel method[J]. Journal of Non-Crystalline Solids, 2011, 357(15): 2840-2845.
[5] [5] MUN K S, ALVAREZ S D, CHOI W Y , et al. A stable, label-free optical interferometric biosensor based on TiO2 nanotube arrays[J]. ACS Nano, 2010, 4(4): 2070-2076.
[6] [6] DHOLAM R, PATEL N, MIOTELLO A. Efficient H-2 production by watersplitting using indium-tin-oxide/V-doped TiO2 multilayer thin film photocatalyst[J].International Journal of Hydrogen Energy, 2011, 36(11): 6519-6528.
[7] [7] LI Li, ZHANG Gui-you, CHEN Ren-jie, et al. Dye-sensitized solar cell and TiO2 thin film materials research progress[J].Functional Materials, 2008, 11(39): 1765-1769.
[8] [8] CHANTAL G, BERNARD B, CEDRIC D, et al. Physicochemical properties and photocatalytic antivities of TiO2-films prepared by sol-gel methods[J].Applied Catalysis Environmental, 2002, 39(4): 331-342.
[9] [9] SHI Zhong-bing, TONG Hong-hui, ZHAO Jia-xue, et al. Optimized design of the magnetic field of magnetron sputtering rectangular target[J]. Vacuum and Cryogenics, 2004, 10(2): 112-116.
[10] [10] LANG Ming, JIANG Hong, XU Hong-wen, et al. Partial pressure of oxygen prepared by magnetron sputtering film and its photocatalytic performance[J]. Glass, 2004, 174(3): 6-9.
[11] [11] ZHENG S K, WANG T M, XIANG G, et a1. Photocatalytic activity of nanostructured TiO2 thin films prepared by DC magnetron sputtering method[J].Vacuum, 2001, 62(4): 361-366.
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FAN Xiao-juan, LAI Zhen-quan, LI Rui. Influence of the Oxygen Flow on TiO2 Thin Films Prepared by DC Magnetron Sputtering[J]. Acta Photonica Sinica, 2012, 41(10): 1247
Received: Jun. 12, 2012
Accepted: --
Published Online: Nov. 7, 2012
The Author Email: Xiao-juan FAN (muxiaojuanjuan@126.com)