Optics and Precision Engineering, Volume. 24, Issue 12, 3012(2016)

Compensation of astigmatism in coordinate measurement for optical aspheric elements

FAN Xiao-ming1... LUO Ci-jin1,2,*, XU Xue-ke2, WU Ling-qi2 and HU Chen2 |Show fewer author(s)
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  • 2[in Chinese]
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    References(12)

    [1] [1] WANG J M. Study on aspheric surface measurement using coordinate contour measuring machine [D]. Suzhou:Soochow University, 2013. (in Chinese)

    [2] [2] LI SH Y. New Technology for Manufacturing and Measurement of Large and Middle-Scale Aspheric Surfaces [M]. Beijing:Changsha:National Defend Industry Press ,2011. (in Chinese)

    [3] [3] LIN X J,WANG Z Q,SAN CH W. Method of probe radius compensation for free surface measurement by CMM [J]. Aeronautical Manufacturing Techonglogy,2011(10):68-70,78. (in Chinese)

    [4] [4] QUAN R,WENG L.The influence of probe radius on the test data in three-coordinate measuring machine and its eliminating method [J]. Acta Metrologica Sinica ,1993(4):251-255. (in Chinese)

    [5] [5] LIANG S R, LIN A C. Probe-radius compensation for 3D data points in reverse engineering [J]. Computers in Industry, 2002, 48(3):241-251.

    [6] [6] MAYER J R R, MIR Y A, TROCHU F, et al.. Touch probe radius compensation for coordinate measurement using kriging interpolation [J]. Proceedings of the Institution of Mechanical Engineers Part B Journal of Engineering Manufacture, 1997, 211(1):11-18.

    [7] [7] LIN Y C, SUN W I. Probe radius compensated by the multi-cross product method in freeform surface measurement with touch trigger probe CMM [J]. The International Journal of Advanced Manufacturing Technology, 2003, 21(10):902-909.

    [8] [8] GUO Y B,GUO J,WANG ZH ZH. Study on measuring path and high-precision curve fitting algorithm for axisymmetric aspheric optics [J]. China Mechanical Engineering, 2008, 19(10):1201-1204. (in Chinese)

    [9] [9] WANG H M. Compensation technology and application for probe radius of coordinate measuring machine [J]. Technology and Test,2010(6):109-112,115. (in Chinese)

    [11] [11] XIE CH Y,CHEN SH K. A new method of the CMM probe radius compensation [J]. Modular Machine Tool & Automatic Manufacturing Technique,2006(1):50-52.(in Chinese)

    [12] [12] YOU Y,WANG Q F, ZI ZH H. A test technique of surface shape aspheric optics parameters based on matlab [J]. Infrared Technology, 2014(4):331-335.(in Chinese)

    CLP Journals

    [1] Li Meixuan, Wang Li, Dong Lianhe, Zhao Ying. Application of aspheric technique in immersion lithography lighting system[J]. Infrared and Laser Engineering, 2017, 46(11): 1118003

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    FAN Xiao-ming, LUO Ci-jin, XU Xue-ke, WU Ling-qi, HU Chen. Compensation of astigmatism in coordinate measurement for optical aspheric elements[J]. Optics and Precision Engineering, 2016, 24(12): 3012

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    Paper Information

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    Received: Oct. 13, 2016

    Accepted: --

    Published Online: Jan. 23, 2017

    The Author Email: Ci-jin LUO (luocij@qq.com)

    DOI:10.3788/ope.20162412.3012

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