[1] [1] RAJURKAR K P, ZHU D, MCGEOUGH J A, et al.. New developments in electro-chemical machining ［J］. CIRP Annals, 1999, 48(2): 567-579.

[2] [2] RAJURKAR K P, SUNDARAM M M, MALSHE A P. Review of electrochemical and electrodischarge machining ［J］. Procedia CIRP, 2013, 6: 13-26.

[3] [3] WANG Y P, XU W J. Experimental study on electrochemical machining of microgrooves ［J］. Electromachining & Mould, 2015(1): 21-24. (in Chinese)

[4] [4] LIU L H, LIU G, XIONG Y, et al.. Fabrication of high-aspect-ratio and high-density X-ray transmission grating ［J］. Opt. Precision Eng., 2009, 17(1): 72-77. (in Chinese)

[5] [5] CUI Y, SHI E L, XIA J S, et al.. Effect of changing mask direction on tip shape ［J］. Opt. Precision Eng., 2009, 17(8): 1865-1869. (in Chinese)

[6] [6] RAFFELSTETTER P, MOLLAY B. On the modeling of shape evolution in through-mask electrochemical micromachining of complex patterned substrates ［J］. Electrochimica Acta, 2010, 55(6): 2149-2157.

[7] [7] LI H S, LI L W, GAO CH P, et al.. Study on molybdenum aperture plate by electrochemical machining with movable cathode mask ［J］. Electromachining & Mould, 2015(1): 37-41. (in Chinese)

[8] [8] YANG M, LI H S, WANG G Q, et al.. Study on small hole machining of MA956 superalloys by electrochemical machining with movable cathode mask ［J］. Electromachining & Mould, 2016(5): 42-46. (in Chinese)

[9] [9] WANG G Q, ZHU D, QU N S. Research of machining array micro-dimples in electrochemical machining ［J］. Electromachining & Mould, 2007(2): 32-34, 46. (in Chinese)

[10] [10] WANG G Q, LI H S, QU N S, et al.. Investigation of the hole-formation process during double-sided through-mask electrochemical machining ［J］. Journal of Materials Processing Technology, 2016, 234: 95-101.

[11] [11] CHEN X L, QU N S, LI H S, et al.. Electrochemical micromachining of micro-dimple arrays using a polydimethylsiloxane (PDMS) mask ［J］. Journal of Materials Processing Technology, 2016, 229: 102-110.

[12] [12] CHEN X L, QU N S, LI H S, et al.. Removal of islands from micro-dimple arrays prepared by through-mask electrochemical micromachining ［J］. Precision Engineering, 2015, 39: 204-211.

[13] [13] QIAN SH Q, ZHANG H, BAO K, et al.. Influence of non-linear electrolyte on the localization of surface texturing with electrochemical pattern transfer ［J］. Machinery Design & Manufacture, 2015(10): 139-141, 145. (in Chinese)

[14] [14] WANG ZH, QIAN SH Q, CAO H B, et al.. Simulation based on electric field about processing of channels by electrochemical pattern transfer machining ［J］. Modern Manufacturing Engineering, 2017(6): 14-19. (in Chinese)

[15] [15] MING P M, ZHU D, ZHOU F, et al.. Fabrication of metal micro-precision sieves with high open areas using UV-LIGA process ［J］. Opt. Precision Eng., 2009, 17(6): 1267-1273. (in Chinese)

[16] [16] MING P M, ZHOU W H, ZHAO CH H, et al.. Active through-mask electrochemical machining with its interelectrode gap filled with flexible porous material ［J］. Scientia Sinica Technologica, 2016, 46(10): 1005-1015. (in Chinese)