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Acta Photonica Sinica, Volume. 46, Issue 12, 1231002(2017)

Influence of Pulse Sputtering Power on the Structural and Optical Properties of SiCx Thin Films Containing Silicon Quantum Dots

ZHAO Fei1...2,*, YANG Wen1,2, MO Jing-hui1,2, ZHANG Zhi-heng1,2, and YANG Pei-zhi12 |Show fewer author(s)
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    ZHAO Fei, YANG Wen, MO Jing-hui, ZHANG Zhi-heng, YANG Pei-zhi. Influence of Pulse Sputtering Power on the Structural and Optical Properties of SiCx Thin Films Containing Silicon Quantum Dots[J]. Acta Photonica Sinica, 2017, 46(12): 1231002

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    Paper Information

    Received: Jul. 9, 2017

    Accepted: --

    Published Online: Nov. 23, 2017

    The Author Email: Fei ZHAO (fzhaobs@126.com)

    DOI:10.3788/gzxb20174612.1231002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology