Fig. 1. (a) Ta₂O₅/SiO₂ multilayer film sample; (b) Spectrogram of multilayer film transmission

Fig. 2. (a) Schematic diagram of laser damage to optical thin films; (b) Experimental platform of laser damage to optical thin films

Fig. 3. Damage probability distribution of multilayer films irradiated by femtosecond, nanosecond and picosecond laser with different laser fluences

Fig. 4. Damage morphology of multilayer film irradiated by 800 nm femtosecond laser for different fluences

Fig. 5. Damage morphology of multilayer film irradiated by 532 nm picosecond laser for different fluences

Fig. 6. Damage morphology of multilayer film irradiated by 1064 nm picosecond laser for different fluences

Fig. 7. Damage morphology of multilayer film irradiated by 532 nm nanosecond laser for different fluences

Fig. 8. Damage morphology of multilayer film irradiated by 1064 nm nanosecond laser for different fluences

Fig. 9. Damage morphology of multilayer film irradiated by 1064 nm nanosecond laser when laser fluence is 24.32 J/cm²