Fig. 1. Effect of cross coupling on raster scanning

Fig. 2. Schematic of electromechanical model for piezoelectric nano-stages

Fig. 3. Multi-perturbation model of piezoelectric nano-stages

Fig. 4. Control structure of periodic disturbance observer

Fig. 5. Experimental setup for couple compensation of pizeoelectric nano-stages

Fig. 6. Open-loop frequency response and fitting model of piezoelectric nano-stage

Fig. 7. Comparison of FIR filter and rational approximation

Fig. 8. Experimental results of output disturbance rejection performance comparison in frequency domain

Fig. 9. Anti-disturbance experimental results with a disturbance of d1(t)=0.6sin(100πt) V and t≥0.2 s

Fig. 10. Anti-disturbance experimental results with a disturbance of d2(t)=0.2sin(200πt) V and t≥0.2 s

Fig. 11. Anti-disturbance experimental results with a disturbance of d3(t)=0.2sin(400πt) V and t≥0.2 s

Fig. 12. Experimental results of step response with a disturbance of d4(t)=0.1sin(4πt), t≥2 s and 100g load

Fig. 13. Experimental results of 50 Hz raster scanning

Fig. 14. Experimental results of 100 Hz raster scanning