Optics and Precision Engineering, Volume. 31, Issue 11, 1641(2023)

Coupling compensation for nano raster scanning of piezoelectric nano-stages with delays

Zhiming ZHANG1...2 and Peng YAN12,* |Show fewer author(s)
Author Affiliations
  • 1School of Mechanical Engineering, Shandong University, Jinan25006, China
  • 2Key Laboratory of High-efficiency and Clean Mechanical Manufacture of the Ministry of Education, Jinan50061, China
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    Figures & Tables(16)
    Effect of cross coupling on raster scanning
    Schematic of electromechanical model for piezoelectric nano-stages
    Multi-perturbation model of piezoelectric nano-stages
    Control structure of periodic disturbance observer
    Experimental setup for couple compensation of pizeoelectric nano-stages
    Open-loop frequency response and fitting model of piezoelectric nano-stage
    Comparison of FIR filter and rational approximation
    Experimental results of output disturbance rejection performance comparison in frequency domain
    Anti-disturbance experimental results with a disturbance of d1(t)=0.6sin(100πt) V and t≥0.2 s
    Anti-disturbance experimental results with a disturbance of d2(t)=0.2sin(200πt) V and t≥0.2 s
    Anti-disturbance experimental results with a disturbance of d3(t)=0.2sin(400πt) V and t≥0.2 s
    Experimental results of step response with a disturbance of d4(t)=0.1sin(4πt), t≥2 s and 100g load
    Experimental results of 50 Hz raster scanning
    Experimental results of 100 Hz raster scanning
    • Table 1. Sinusoidal disturbance suppression performance

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      Table 1. Sinusoidal disturbance suppression performance

      Disturbance

      frequency/Hz

      RMS output/nmRMS disturbance-estimate error/V
      Only feedbackBPDOBThis methodOnly feedbackBPDOBThis method
      501 322.74.62.2-0.001 50.000 7
      100834.511.35.0-0.001 90.000 9
      2001 392.360.725.2-0.006 30.002 6
    • Table 2. Sinusoidal disturbance suppression performance

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      Table 2. Sinusoidal disturbance suppression performance

      Scanning frequency/HzRMS positioning error during scanning/nm
      Only feedbackBPDOBThis method
      5017.66.53.8
      10025.99.65.5
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    Zhiming ZHANG, Peng YAN. Coupling compensation for nano raster scanning of piezoelectric nano-stages with delays[J]. Optics and Precision Engineering, 2023, 31(11): 1641

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Jan. 10, 2023

    Accepted: --

    Published Online: Jul. 4, 2023

    The Author Email: YAN Peng (yanpeng@sdu.edu.cn)

    DOI:10.37188/OPE.20233111.1641

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