Optics and Precision Engineering, Volume. 31, Issue 11, 1641(2023)
Coupling compensation for nano raster scanning of piezoelectric nano-stages with delays
Fig. 2. Schematic of electromechanical model for piezoelectric nano-stages
Fig. 5. Experimental setup for couple compensation of pizeoelectric nano-stages
Fig. 6. Open-loop frequency response and fitting model of piezoelectric nano-stage
Fig. 8. Experimental results of output disturbance rejection performance comparison in frequency domain
Fig. 9. Anti-disturbance experimental results with a disturbance of
Fig. 10. Anti-disturbance experimental results with a disturbance of
Fig. 11. Anti-disturbance experimental results with a disturbance of
Fig. 12. Experimental results of step response with a disturbance of
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Zhiming ZHANG, Peng YAN. Coupling compensation for nano raster scanning of piezoelectric nano-stages with delays[J]. Optics and Precision Engineering, 2023, 31(11): 1641
Category: Micro/Nano Technology and Fine Mechanics
Received: Jan. 10, 2023
Accepted: --
Published Online: Jul. 4, 2023
The Author Email: YAN Peng (yanpeng@sdu.edu.cn)